Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers
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چکیده
منابع مشابه
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1 Department of Electrical and Electronic Engineering, Okayama University, Japan 2 Metamaterials Laboratory, RIKEN, Japan 3 Quantum Nanoelectronics Research Center, Tokyo Institute of Technology, Japan 4 Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Japan 5 Department of Electrical Engineering and Information Systems, The University of Tokyo, Japan 6 Resear...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2000
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.120.493